ISO/FDIS 25178-603
Superseded
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
Hardcopy , PDF
English, French
11-13-2024
02-14-2025
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
| Committee |
ISO/TC 213
|
| DocumentType |
Draft
|
| Pages |
18
|
| PublisherName |
International Organization for Standardization
|
| RevisionOf | |
| Status |
Superseded
|
Please Login or Create an Account so you can add users to your Multi user PDF Later.
Important note : All end users must be registered with an Account prior to user licenses being assigned.
Users cannot be edited or removed once added to your Multi user PDF.