SS-EN ISO 14644-10 : 2013
Superseded
View Superseded by
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
Hardcopy
English
03-11-2013
06-01-2022
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
| Committee |
TC 209
|
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Standardiserings-Kommissionen I Sverige
|
| Status |
Superseded
|
| SupersededBy |
| Standards | Relationship |
| EN ISO 14644-10:2013 | Identical |
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