SS-EN ISO 14644-10:2022
Current
Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
Hardcopy
English
05-24-2022
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
| Committee |
ISO/TC 209
|
| DocumentType |
Standard
|
| Pages |
40
|
| PublisherName |
Standardiserings-Kommissionen I Sverige
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| ISO 14644-10:2022 | Identical |
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