SS-EN ISO 14644-14 : 2016
Superseded
View Superseded by
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
Hardcopy
English
11-10-2016
04-03-2026
This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.
| Committee |
TC 209
|
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Standardiserings-Kommissionen I Sverige
|
| Status |
Superseded
|
| SupersededBy |
| Standards | Relationship |
| EN ISO 14644-14:2016 | Identical |
| ISO 14644-14:2016 | Identical |
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