SS-EN ISO 14644-14:2026
Current
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2026, IDT)
Hardcopy
English
03-16-2026
This document specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.
| Committee |
ISO/TC 209
|
| DocumentType |
Standard
|
| Pages |
29
|
| PublisherName |
Standardiserings-Kommissionen I Sverige
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| ISO 14644-14:2026 | Identical |
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