ASTM F 863 : 1984 : R1992 : EDT 1
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Practice for Detection of Defects in Spin-Coated Resist (Withdrawn 1996)
Hardcopy , PDF
01-01-1996
English
31-12-2010
CONTAINED IN VOL 10.05 1997 Detects defects in spin-coated resist on clear substrates used in the evaluation and process control of spin-coating resist systems.
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