PD ISO/TR 16268:2009
Current
The latest, up-to-date edition.
Surface chemical analysis. Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation
Hardcopy , PDF
English
30-11-2009
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Concept and procedure
6 Requirements
7 Certification
Annex A (informative) - Ion implantation
Annex B (informative) - Ion-implantation dosimetry
Annex C (informative) - X-ray fluorescence spectrometry
Annex D (informative) - Non-certified secondary reference
materials and substitutes
Annex E (informative) - Uncertainties in measurements of
areic dose
Bibliography
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