SEMI 3D11 : 2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TERMINOLOGY FOR THROUGH GLASS VIA AND BLIND VIA IN GLASS GEOMETRICAL METROLOGY
05-10-2020
06-01-2015
Specifies clear and commonly accepted definitions of through glass vias (TGV) and to provide a consistent terminology for the understanding and discussion of metrology issues important them.
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