SEMI D15 : 1996(R2003)
Current
The latest, up-to-date edition.
FPD GLASS SUBSTRATE SURFACE WAVINESS MEASUREMENT METHOD
12-01-2013
Covering the measurement of FPD glass substrate surface waviness by measuring instruments employing mechanical stylus, optical stylus, and optical interferometric measurement procedures. It is applicable to use this method for the documentation of waviness of all types of glass substrates used for flat panel displays.
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