SEMI E48 : 2001(R2007)
Current
The latest, up-to-date edition.
SPECIFICATION FOR SMIF INDEXER VOLUME REQUIREMENT
12-01-2013
Provides the volume required within a tool to enable integration of SMIF into tools with multiple or single ports. It defines the space necessary within a tool with respect to the interface plane. The specification refers to the Standard Interface (SMIF) standard, SEMI E19.
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