SEMI E54.18 : 2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PUMP DEVICE
05-10-2020
12-01-2013
Describes a network-independent application model comprised of device objects which are common to all Vacuum Pump Devices on a semiconductor equipment Sensor/Actuator communications network.
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