Name: SEMI F33 : 2008
Brand: SEMI

TEST METHOD FOR CALIBRATION OF ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER (APIMS)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides guidelines for the calibration of the APIMS for measurement of impurities in nitrogen, argon, helium and hydrogen. Also provides guidelines for application of other techniques with similar detection limits and response time to APIMS which may not be commercially available at this time.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (06/2008)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI F33 : 2008

TEST METHOD FOR CALIBRATION OF ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER (APIMS)

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