Name: SEMI F4 : 2011
Brand: SEMI

SPECIFICATION FOR PNEUMATICALLY ACTUATED CYLINDER VALVES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Sets up the minimum design and performance requirements for pneumatically actuated cylinder valves used in semiconductor manufacturing. Also intended as an aid in the procurement of these valves.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI F4 : 2011

SPECIFICATION FOR PNEUMATICALLY ACTUATED CYLINDER VALVES

Abstract

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