SEMI F60 : 2014
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR ESCA EVALUATION OF SURFACE COMPOSITION OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS
Published date
12-01-2013
Specifies a method for testing passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system.
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