SEMI G32 : 1994(R2011)
Current
The latest, up-to-date edition.
GUIDELINE FOR UNENCAPSULATED THERMAL TEST CHIP
12-01-2013
Details recommendations for a standardized thermal test chip design for referee test purposes. Sample data format for the test chip can be found in Appendix A. The following recommendations are made for the design of thermal test chips for VLSI package characterization based on the results of computer simulations of various chip-substrate configurations.
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