SEMI MF1569 : 2007

Name: SEMI MF1569 : 2007
Brand: SEMI
Price: 251.14 AUD
Availability: InStock

Superseded

View Superseded by

GUIDE FOR GENERATION OF CONSENSUS REFERENCE MATERIALS FOR SEMICONDUCTOR TECHNOLOGY

Available format(s)

Hardcopy

Superseded date

16-11-2023

Language(s)

English

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Covers the procedures for producing a single set of consensus reference materials (ConRefs) in the absence of suitable certified reference materials from an established source.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2005) Also available in CD-ROM. (02/2007)
DocumentType	Revision
Pages	0
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI MF1569:2007(2012)

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