SEMI S11 : 1996
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
ENVIRONMENTAL SAFETY, AND HEALTH GUIDELINES FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT MINIENVIRONMENTS
01-11-2006
12-01-2013
Gives minimum performance-based health, environmental, and safety considerations for minienvironments used in semiconductor manufacturing. Applies to minienvironments used in assembly, testing, metrology and manufacturing of semiconductor products and is intended to supplement SEMI S2.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.