SEMI S17 : 2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV) SYSTEMS
06-04-2019
12-01-2013
Applies as a set of safety considerations for unmanned transport vehicle (UTV) system.
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