SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 1: TERMS AND DEFINITIONS

Available format(s)

Hardcopy

Language(s)

German, English - French

Published date

01-04-2016

Publisher

Swiss Standards

1 Scope
2 Terms and definitions
  2.1 General terms
  2.2 Terms relating to science and engineering
  2.3 Terms relating to material science
  2.4 Terms relating to functional element
  2.5 Terms relating to machining technology
  2.6 Terms relating to bonding and assembling technology
  2.7 Terms relating to evaluation technology
  2.8 Terms relating to application technology
Annex A (informative) Standpoint and criteria in editing
        this glossary

Committee	CES/TK 47
DocumentType	Standard
Pages	0
PublisherName	Swiss Standards
Status	Current

Standards	Relationship
DIN EN 62047-1:2014-05 (Draft)	Identical
NBN EN 62047-1 : 2016	Identical
I.S. EN 62047-1:2016	Identical
NF EN 62047-1 : 2016	Identical
BS EN 62047-1:2016	Identical
IEC 62047-1:2016	Identical
EN 62047-1:2016	Identical