04/30112669 DC : DRAFT APR 2004
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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BS EN ISO 14644-8 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - CLASSIFICATION OF AIRBORNE MOLECULAR CONTAMINATION
23-11-2012
29-09-2006
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and Definitions
3.1 General
3.2 Contaminant categories
4 Classification
4.1 General
4.2 ISO-AMC descriptor format
5 Demonstration of compliance
5.1 Principle
5.2 Testing
5.3 Test report
Annex A (informative) Parameters for consideration
A.1 Principles
A.2 Concepts for establishing parameters
A.3 Outdoor air
A.4 Construction materials
A.5 Cross contamination
A.6 Operation and maintenance
A.7 Personnel
A.8 Other sources
Annex B (informative) Typical contaminants
B.1 Principle
Annex C (informative) Typical methods of measurements
C.1 Principle
C.2 Method concepts
C.3 Typical sampling methods
C.4 Typical analysis methods
C.4.1 Off-line analysis methods
C.4.2 On-line monitors
C.5 Selection of typical sampling devices and analysis methods
C.6 Test methods for AMC measurements - Reference
Documents
Annex D (informative) Consideration of specific requirements for
separative devices
D.1 Principle
D.2 Specific considerations
Bibliography
BS EN ISO 14644-8
| Committee |
LBI/30
|
| DocumentType |
Draft
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| ISO 14644-6:2007 | Cleanrooms and associated controlled environments — Part 6: Vocabulary |
| ISO 14644-5:2004 | Cleanrooms and associated controlled environments — Part 5: Operations |
| ISO 14644-4:2001 | Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |