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05/30142385 DC : DRAFT NOV 2005

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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ISO 14644-6 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 6: VOCABULARY

Published date

23-11-2012

Superseded date

31-08-2007

Superseded by

BS EN ISO 14644-6:2007

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1 Scope
2 Normative references
3 Terms and definitions

Committee
LBI/30
DocumentType
Draft
PublisherName
British Standards Institution
Status
Superseded
SupersededBy

ISO 14644-8:2013 Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC)
ISO 14698-2:2003 Cleanrooms and associated controlled environments — Biocontamination control — Part 2: Evaluation and interpretation of biocontamination data
ISO 14644-2:2015 Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
ISO 14644-5:2004 Cleanrooms and associated controlled environments — Part 5: Operations
ISO 14698-1:2003 Cleanrooms and associated controlled environments — Biocontamination control — Part 1: General principles and methods
ISO 14644-3:2005 Cleanrooms and associated controlled environments — Part 3: Test methods
ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
ISO 14644-1:2015 Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration
ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up

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