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11/30199166 DC : 0

Current

Current

The latest, up-to-date edition.

BS ISO 11952 - SURFACE CHEMICAL ANALYSIS - SCANNING PROBE MICROSCOPY - DETERMINATION OF GEOMETRIC QUANTITIES USING SPM - CALIBRATION OF MEASURING SYSTEMS

Available format(s)

Hardcopy , PDF

Language(s)

English

£20.00
Excluding VAT

1 Scope
2 Normative references, terms and definitions
3 Symbols
4 Characteristics of scanning probe microscopes
5 Preliminary characterization of the measuring system
6 Calibration
7 Report of calibration results
8 Uncertainties of measurement
9 Report of results (form)
Annex A (informative) - Exemplary superposition of
        disturbing influences in the topography
Annex B (informative) - Sound investigations: Effects
        of a sound proofing hood
Annex C (informative) - Thermal isolation effect of a
        sound proofing hood/measuring cabin
Annex D (informative) - Control parameters and scan
        speed; handling of contaminations
Annex E (informative) - Step height determination:
        comparison histogram and ISO 5436 method
Annex F (normative) - Uncertainty of measurement for
        lateral measurands
Bibliography

BS ISO 11952

Committee
CII/60
DocumentType
Draft
Pages
58
PublisherName
British Standards Institution
Status
Current

ISO 12179:2000 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Calibration of contact (stylus) instruments
ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO Guide 30:2015 Reference materials — Selected terms and definitions
ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
ISO 12853:2015 Microscopes — Information provided to the user
ISO 5436-1:2000 Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures
ISO 18115-2:2013 Surface chemical analysis — Vocabulary — Part 2: Terms used in scanning-probe microscopy
ISO 13095:2014 Surface Chemical Analysis — Atomic force microscopy — Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
ISO 11775:2015 Surface chemical analysis — Scanning-probe microscopy — Determination of cantilever normal spring constants
ISO Guide 34:2009 General requirements for the competence of reference material producers

£20.00
Excluding VAT