12/30241146 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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BS ISO 16531 - SURFACE CHEMICAL ANALYSIS - DEPTH PROFILING - METHODS FOR ION BEAM ALIGNMENT AND THE ASSOCIATED MEASUREMENT OF CURRENT OR CURRENT DENSITY FOR DEPTH PROFILING IN AES AND XPS
Hardcopy , PDF
English
31-05-2013
Foreword
Introduction
1 Scope
2 Normative references
3 Symbols and abbreviated terms
4 Requirement of the system
5 Procedures of ion beam alignment
6 When to align and check the ion beam
alignment
Annex A (informative) - Comparison of AES depth
profiles with good and poor ion beam
alignment
Annex B (informative) - Alignment method using a
cup with co-axial electrodes
Bibliography
BS ISO 16531.
| Committee |
CII/60
|
| DocumentType |
Draft
|
| Pages |
23
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| ISO 18115-1:2013 | Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy |
| ISO 14606:2015 | Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials |
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