BS ISO 11952:2019
Current
The latest, up-to-date edition.
Surface chemical analysis. Scanning-probe microscopy. Determination of geometric quantities using SPM: Calibration of measuring systems
Hardcopy , PDF
English
31-05-2019
This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level.
| Committee |
CII/60
|
| DocumentType |
Standard
|
| ISBN |
9780580882968
|
| Pages |
72
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
1 This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.This document has the following objectives: — to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length; — to define the minimum requirements for the calibration process and the conditions of acceptance; — to ascertain the instrument\'s ability to be calibrated (assignment of a “calibrate-ability” category to the instrument); — to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); — to provide a model, in accordance with ISO/IECGuide98-3 , to calculate the uncertainty for simple geometrical quantities in measurements using an SPM; — to define the requirements for reporting results.
| Standards | Relationship |
| ISO 11952:2019 | Identical |
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