IEC 62047-21:2014
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users
English - French
19-06-2014
FOREWORD
1 Scope
2 Normative references
3 Terms, definitions, symbols and designations
4 Test piece
5 Testing method and test apparatus
6 Test report
Annex A (informative) - Measurement example of Poisson's
ratio using type 1 test piece
Annex B (informative) - Analysis of test results obtained
from a type 2 test piece
Bibliography
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