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JIS C 5630-2:2009

JIS C 5630-2:2009

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Semiconductor devices -- Micro-electromechanical devices-- Part 2: Tensile testing method of thin film materials

Published date

20-03-2009

Publisher

Japanese Standards Association

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DocumentType
Standard
ProductNote
Japanese PDF version unavailable from Intertek Inform.
PublisherName
Japanese Standards Association
Status
Current

Standards Relationship
IEC 62047-2:2006 Identical

2009(R2013) [21/10/2013]2009 [20/03/2009]

JIS C 5630-3:2009 Semiconductor devices -- Micro-electromechanical devices-- Part 3: Thin film standard test piece for tensile testing

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