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JIS C 5630-26:2017

Current

Current

The latest, up-to-date edition.

Semiconductor devices -- Micro-electromechanical devices -- Part 26: Description and measurement methods for micro trench and needle structures

Published date

20-10-2017

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DocumentType
Standard
ProductNote
Japanese PDF version unavailable from Intertek Inform.
PublisherName
Japanese Standards Association
Status
Current

Standards Relationship
IEC 62047-26:2016 Identical

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