JIS C 5630-30:2020
Current
Current
The latest, up-to-date edition.
Semiconductor devices -- Micro-electromechanical devices -- Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
Published date
23-03-2020
Publisher
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| DocumentType |
Standard
|
| ProductNote |
Japanese PDF version unavailable from Intertek Inform.
|
| PublisherName |
Japanese Standards Association
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-30:2017 | Identical |
Summarise
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