Measuring methods of low pressures by hot cathode and cold cathode ionization gauges

Available format(s)

Hardcopy , PDF

Language(s)

English, Japanese

Published date

31-05-1989

Publisher

Japanese Standards Association

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This Japanese Industrial Standard specifies the general methods of measurement for low pressures using hot cathode and cold cathode ionization gauges, hereinafter referred to as the "gauges".

DocumentType	Standard
Pages	8
PublisherName	Japanese Standards Association
Status	Current

Reaffirmed 2014 1989(R2014) [20/10/2014]1989(R2009) [01/10/2009]1989(R2000) [20/01/2000]1989 [01/03/1989]1976

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JIS Z 8752:1989

Measuring methods of low pressures by hot cathode and cold cathode ionization gauges

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