NEN EN ISO 25178-603 : 2013
Current
Current
The latest, up-to-date edition.
GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 603: NOMINAL CHARACTERISTICS OF NON-CONTACT (PHASE-SHIFTING INTERFEROMETRIC MICROSCOPY) INSTRUMENTS
Published date
12-01-2013
Publisher
Explains the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
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