Name: NEN-ISO 11952 : 2019 - Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems
Brand: Netherlands Standards

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Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems

Published date

01-06-2019

Publisher

Netherlands Standards

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NEN-ISO 11952 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level.