Name: NEN ISO 14237 : 2010 - SURFACE CHEMICAL ANALYSIS - SECONDARY-ION MASS SPECTROMETRY - DETERMINATION OF BORON ATOMIC CONCENTRATION IN SILICON USING UNIFORMLY DOPED MATERIALS
Brand: Netherlands Standards

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SURFACE CHEMICAL ANALYSIS - SECONDARY-ION MASS SPECTROMETRY - DETERMINATION OF BORON ATOMIC CONCENTRATION IN SILICON USING UNIFORMLY DOPED MATERIALS

Published date

12-01-2013

Publisher

Netherlands Standards

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Defines a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon using uniformly doped materials calibrated by a certified reference material implanted with boron.