NEN-ISO 16413:2020
Current
Current
The latest, up-to-date edition.
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
Published date
01-09-2020
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NEN-ISO 16413 specifies a method for the evaluation of thickness, density and interface width of single layer and multi-layered thin films which have thicknesses between approximately 1 nm and 1 μm,on flat substrates, by means of X-Ray Reflectometry (XRR).
| Committee |
TC 201
|
| DocumentType |
Standard
|
| PublisherName |
Netherlands Standards
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| ISO 16413:2020 | Identical |
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