NEN ISO 20341 : 2003
Current
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The latest, up-to-date edition.
SURFACE CHEMICAL ANALYSIS - SECONDARY-ION MASS SPECTROMETRY - METHOD FOR ESTIMATING DEPTH RESOLUTION PARAMETERS WITH MULTIPLE DELTA-LAYER REFERENCE MATERIALS
Published date
12-01-2013
Publisher
Defines procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
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