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NEN ISO 4 : 2003

Current

Current

The latest, up-to-date edition.

MEASUREMENT OF THERMAL CONDUCTIVITY OF THIN FILMS ON SILICON SUBSTRATES

Published date

12-01-2013

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Specifies a standard procedure for the three-omega method proposed for measuring the thermal conductivity of a thin, electrically insulating film, on a substrate having a thermal conductivity significantly greater than the thermal conductivity of the film.

DocumentType
Standard
PublisherName
Netherlands Standards
Status
Current

Standards Relationship
ISO 4:1997 Identical

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