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PN EN 62047-17 : 2015

Current

Current

The latest, up-to-date edition.

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 17: BULGE TEST METHOD FOR MEASURING MECHANICAL PROPERTIES OF THIN FILMS

Published date

14-12-2015

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Committee
TC 60
DocumentType
Standard
PublisherName
Polish Committee for Standardization
Status
Current

Standards Relationship
IEC 62047-17:2015 Identical
EN 62047-17:2015 Identical

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