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PREN ISO 14644-8 : DRAFT 2011

Superseded

Superseded

View Superseded by

CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ISO/DIS 14644-8:2011)

Published date

12-01-2013

Superseded date

01-02-2013

Superseded by

EN ISO 14644-8:2013

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Summarise this standard

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (informative) - Parameters for consideration
Annex B (informative) - Typical contaminants
Annex C (informative) - Typical methods of measurement
Annex D (informative) - Consideration of specific
        requirements for separative devices
Bibliography

Includes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.

Committee
TC 243
DocumentType
Draft
PublisherName
Comite Europeen de Normalisation
Status
Superseded
SupersededBy

Standards Relationship
11/30248115 DC : 0 Identical

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