PREN ISO 14644-8 : DRAFT 2011
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ISO/DIS 14644-8:2011)
01-02-2013
12-01-2013
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (informative) - Parameters for consideration
Annex B (informative) - Typical contaminants
Annex C (informative) - Typical methods of measurement
Annex D (informative) - Consideration of specific
requirements for separative devices
Bibliography
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