![header thumbnail](/images/publishers\semi_cover.gif)
SEMI C3.46 : 2002
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
![header thumbnail](/images/publishers\semi_cover.gif)
STANDARD FOR ARGON (AR), BULK LIQUID, 99.9992% QUALITY
01-03-2005
12-01-2013
Provide a specification for Argon (Ar) used in the semiconductor industry. It also covers requirements for Argon (Ar) used in the semiconductor industry.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.