Name: SEMI C55 : 2004(R2018)
Brand: SEMI
Availability: InStock

SPECIFICATION FOR LIQUID CARBON DIOXIDE (CO[2]) USED IN NEAR CRITICAL, CRITICAL AND SUPERCRITICAL APPLICATIONS, >/ 99.99% QUALITY

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives a specification for liquid carbon dioxide (CO[2]) that is used in near critical, critical and supercritical applications in the semiconductor industry.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (10/2004)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI C55 : 2004(R2018)

SPECIFICATION FOR LIQUID CARBON DIOXIDE (CO[2]) USED IN NEAR CRITICAL, CRITICAL AND SUPERCRITICAL APPLICATIONS, >/ 99.99% QUALITY

Abstract

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