Name: SEMI E41 : 1995
Brand: SEMI
Availability: InStock

EXCEPTION MANAGEMENT (EM) STANDARD

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

The main document looks at the communication requirements within the semiconductor manufacturing environment with respect to equipment exception handling. It defines capabilities to be provided by the exception agent for effective interaction and reporting with regards to abnormal situations in the equipment. The subordinate document: SEMI E41.1 "SECS-II Support for the Exception Management Standard" maps the data and services of its prime document SEMI E41 to SECS-II functions and streams and data definitions.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI E41 : 1995

EXCEPTION MANAGEMENT (EM) STANDARD

Abstract

General Product Information

Standards Referenced By This Book

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