SEMI E54.21 : 2010(R2017)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SENSOR ACTUATOR NETWORK FOR MOTIONNET COMMUNICATION
Published date
12-01-2013
Specifies a communication specification based on the MOTIONNET[R] protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.
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