SEMI E62 : NOV 2006(R2012)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS)
Published date
12-01-2013
Describes the tool side of the interface between a process or metrology tool and a front-opening box. Also intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchange-ability at all mechanical interfaces.
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