Name: SEMI E83 : 2015
Brand: SEMI
Availability: InStock

SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Pertains to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E106 : 2004

OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS

SEMI E162 : 2012	MECHANICAL INTERFACE SPECIFICATION FOR 450 MM FRONT-OPENING SHIPPING BOX LOAD PORT
SEMI G82 : 2015	SPECIFICATION FOR 300 MM LOAD PORT FOR FRAME CASSETTES IN BACKEND PROCESS
SEMI E64 : 2005(R2012)	SPECIFICATION FOR 300 MM CART TO SEMI E15.1 DOCKING INTERFACE PORT
SEMI E154 : 2014	MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT
SEMI E15-1 : 2005(R2010)	SPECIFICATION FOR 300 MM TOOL LOAD PORT
SEMI G95 : 2014	MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT FOR TAPE FRAME CASSETTES IN THE BACKEND PROCESS
SEMI E15 : 1998E2(R2016)	SPECIFICATION FOR TOOL LOAD PORT

Sorry this product is not available in your region.

Access your standards online with a subscription

Features

SEMI E83 : 2015