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SEMI E90 : 2012(R2018)

SEMI E90 : 2012(R2018)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SUBSTRATE TRACKING

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the standard services of equipment to track substrates (manufactured product) in manufacturing equipment. Also defines the concepts and behaviors for the information management of substrates, as well as the messages/services.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Revision
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E169 : 2015 GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY
SEMI E54.24 : 2016 SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL OF A GENERIC EQUIPMENT NETWORKED SENSOR (GENSEN)
SEMI E116 : 2017 SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING
SEMI E87 : 2017 SPECIFICATION FOR CARRIER MANAGEMENT (CMS)
SEMI D54 : 2009E SPECIFICATION FOR SUBSTRATE MANAGEMENT OF FPD PRODUCTION (SMS-FPD)
SEMI E157 : 2011(R2016) SPECIFICATION FOR MODULE PROCESS TRACKING
SEMI E98 : 2009 PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM)
SEMI E174 : 2017 SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)
SEMI E130 : 2017 SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)
SEMI E172 : 2018 SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD)
SEMI E118 : NOV 2004E SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE
SEMI E168 : 2015 SPECIFICATION FOR PRODUCT TIME MEASUREMENT
SEMI E164 : 2014 SPECIFICATION FOR EDA COMMON METADATA
SEMI E147 : 2007E GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA)
SEMI E127 : 2008 SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC)
SEMI E142 : MAR 2006 SPECIFICATION FOR SUBSTRATE MAPPING

SEMI E39.1 : 2003(R2014) SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS)
SEMI E87 : 2017 SPECIFICATION FOR CARRIER MANAGEMENT (CMS)
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES
SEMI E53 : 2004 EVENT REPORTING

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