SEMI F77 : 2015
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The latest, up-to-date edition.
TEST METHOD FOR ELECTROCHEMICAL CRITICAL PITTING TEMPERATURE TESTING OF STAINLESS STEEL SURFACES USED IN CORROSIVE GAS SYSTEMS
Published date
12-01-2013
Pertains to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing.
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