SEMI M8 : 2012
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON TEST WAFERS
16-11-2023
01-03-2012
Describes requirements for virgin silicon test wafers to be used for mechanical testing, and routine process monitoring in semiconductor manufacturing.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.