SEMI MF671:2012(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials
Hardcopy
17-11-2023
English
01-01-2018
This Test Method covers techniques for determination of the length of the flatted portion of a wafer periphery.
Important note : All end users must be registered with an Account prior to user licenses being assigned.Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.