SEMI P21 : 1992(R2003)
Current
The latest, up-to-date edition.
GUIDELINES FOR PRECISION AND ACCURACY EXPRESSION FOR MASK WRITING EQUIPMENT
12-01-2013
Describes general requirements concerning accuracy and precision expression of mask writing equipment. Writing accuracy of the mask writing equipment is evaluated by measuring a written mask, and is affected greatly by process conditions to be carried out. Thus, the writing conditions are to be agreed upon by the user and the maker.
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