SEMI P36 : 2008(R2013)
Current
Current
The latest, up-to-date edition.
GUIDE FOR MAGNIFICATION REFERENCE FOR CRITICAL DIMENSION MEASUREMENT SCANNING ELECTRON MICROSCOPES (CD-SEM)
Published date
12-01-2013
Provides guidelines: - to define common and important specifications of magnification references which are used for calibrating magnifications of critical dimension measurement scanning electron microscopes (CD-SEMs), and as the result; - to provide magnification references which are easy for anyone to use.
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