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UNE-EN 62047-12:2011

Current

Current

The latest, up-to-date edition.

Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (Endorsed by AENOR in February of 2012.)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-02-2012

£67.82
Excluding VAT

Committee
CTN 209/SC 47
DocumentType
Standard
Pages
33
PublisherName
Asociación Española de Normalización
Status
Current

Standards Relationship
BS EN 62047-12:2011 Equivalent
I.S. EN 62047-12:2011 Equivalent
IEC 62047-12:2011 Identical
EN 62047-12:2011 Identical

£67.82
Excluding VAT